Features
of the equipment
ü Electron
gun: Tungsten Schottky emission electron source
ü
Resolution:
1.2nm/30Kv, 3.0 nm/1Kv
ü
Probe current: 1pA~200nA
ü Specimen
chamber pressure: 10-4Pa (high-vacuum), 10~300Pa (low vacuum)
|
Unique
features/Measurement capabilities, if any
|
Instrument
Technical Description and Major Specifications
ü Electron
gun: Tungsten Schottky emission electron source
ü
Resolution:
1.2nm/30Kv, 3.0 nm/1Kv
ü
Probe current: 1pA~200nA
ü Specimen
chamber pressure: 10-4Pa (high-vacuum), 10~300Pa (low vacuum)
|
Measurement/Sample
specifications:
ü Specimen
Size: Max 150 mm dia.x40 mm H Magnification: 500,000 x
|